ASML began collecting data off tools in fabs from ca 1986 for the purpose of diagnostics and troubleshooting. This continued on a manual basis through the 1980's and into the early 1990's when tools began to be connected to the fab network and to the internet. Following manual collection, networked data collection began to take shape and then remote collection began ca 1996. It was from then for the next ten years improvements in data collection occurred; for the past ten years, from 2006, as data volumes sharply increased, the more robust, centrally connected BRES system has been in place, improving ASML's overall customer satisfaction and tool availability levels.