The Factory Integration (FI) focus area of the IRDS is dedicated to ensure that the semiconductor manufacturing infrastructure contains the necessary components to produce increasingly complex and advanced integrated circuits and devices while extending the historical performance vs. cost trends expressed by Moore's Law. This requires taking full advantage of traditional measures (e.g., device feature size reductions, new materials, yield improvement, wafer size increases) as well as progress of data technologies such as Big Data, Cloud computing, in a safe and sustainable manner.