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We investigate the RF electric field configuration in a cylindrical inductively coupled plasma (ICP) sustained by 13.56MHz RF currents at low gas pressures. The RF power is delivered by means of a planar one-turn coil antenna placed on top of the dielectric (quartz) top wall of the chamber. The antenna is shielded by means of an electrostatic shield with multiple radial slits cut into a metal plate inserted between the antenna and the dielectric plate. This design is intended to suppress capacitive coupling while affecting otherwise as little as possible the antenna efficiency. We discuss the trade-offs of the shield design and show how its performance is influenced by two major design parameters: the number of slits and the aperture ratio.