Coplanar waveguide (CPW) fed slot antennas are attractive due to low dispersion and ease of integration with active and passive devices. In this paper, design of slot antenna fed by CPW through capacitive coupling with finite ground plane is presented. The propose antenna exhibit perfect impedance matching, unidirectional radiation patterns, and low cross polarization. Analysis of the effects of various slot dimensions on the parameters of the antenna design has been carried out. Proper simulated results are obtained by using a square slot having a width of λg/2 which is fed by CPW through capacitive coupling. The Computer Simulation Technology (CST) Microwave Studio Software is used for simulation.