The work presents and validates a tool for the prediction of the damping coefficient at frequencies (20–30 kHz), air gaps (2–3 μm) and pressures (0.2–2 mbar) typical of MEMS gyroscopes. It is indeed quite challenging to accurately estimate the quality factor (Q) of a MEMS mode of complex geometry (comb resonators, folded springs, vertical perforated frames…). This work extensively models the damping contributions, validating the predictions through measurements on 292 devices belonging to 36 different geometries. The 23-μm-thick structures are initially tested in their package and a first pressure estimation is done. In order to verify the value and to validate the model, each package is subject to a focus ion beam (FIB) procedure, so that a hole is created and the devices can be operated at variable pressures in a vacuum chamber. This allows to confirm damping predictions with a ±15% accuracy, mostly limited by the accuracy of the used reference pressure sensors.