2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) > 427 - 430
Source
Abstract
Identifiers
book e-ISBN : | 978-1-5090-1973-1 , 978-1-5090-1972-4 |
DOI | 10.1109/MEMSYS.2016.7421652 |
book e-ISBN : | 978-1-5090-1973-1 , 978-1-5090-1972-4 |
DOI | 10.1109/MEMSYS.2016.7421652 |