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CPW lines on a 0.015 0-cm resistivity silicon substrate are simulated using HFSS. The electric field distribution from HFSS is analyzed to demonstrate that silicon substrate loss plays an important role and cannot be ignored. A novel physics-based model is developed to predict the characteristics of the CPWs and compared with measured data. A good agreement is obtained up to 110 GHz and demonstrates that the propagation characteristics of CPWs on lossy substrates can be predicted and investigated by the equivalent circuit proposed.