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This paper presents a new RF-DC rectifier with high power conversion efficiency (PCE) at 13.56MHz, utilizing a novel controlled Vth compensation technique. Simulation results show the maximum PCE of the single-stage, 3-stage, and 5-stage rectifiers are 65.7%, 56.2%, and 50.5% with low input power of −17.64dBm, −8.86dBm, and −5.3dBm, respectively.