In this paper, we try to fabricate the planer heterojunction (PHJ) perovskite solar cell based on low temperature TiOx compact layer by chemical bath deposition (CBD) method. We compared solar cell properties between compact-TiOx layer and compact-TiO2 layer, where CBD deposited films were heated at 250 °C in order to convert into TiOx amorphous state and 450 °C intoTiO2 anatase state, respectively. Power conversion efficiency of PHJ perovskite solar cell based on our compact-TiOx shows almost same as that of TiO2 one. In addition, we discuss the origin of hysteresis of PHJ perovskite solar cell based on compact-TiOx and TiO2. We conclude that hysteresis of PHJ perovskite solar cell is heavily influenced by surface coverage and roughness of compact-TiOx or TiO2 layers on transparent conducting oxide.