Most of commercial Atomic Force Microscope (AFM) oscillating probes use micrometric cantilevers that can make measurement with piconewton force resolution under vacuum. However, the flexure vibration cantilevers suffer from a degradation of both resonance frequency and quality factor when operating in liquids. Moreover, the additional laser set-up for amplitude detection also limits the integration and miniaturization of the resonator structure. In order to overcome these difficulties, we propose to replace cantilevers by bulk mode, in-plane vibrating MEMS resonators with integrated transduction methods.