A series of THz metamaterials were fabricated, which have different pattern line widths of Au and different doping carrier densities of p-type silicon substrate. Transmission spectra of the metamaterials were obtained by a terahertz time domain spectroscopic measurement. Upon increasing the doping carrier density and narrowing the pattern line width, the transmission spectra showed a blue shift in resonance frequency and a broadening of resonance spectral shape, i.e., a decrease in quality factor.