Journal of Microelectromechanical Systems > 2014 > 23 > 4 > 862 - 870
Source
Abstract
Identifiers
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2014.2307391 |
Journal of Microelectromechanical Systems > 2014 > 23 > 4 > 862 - 870
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2014.2307391 |