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We report the Si wire AWG without systematic phase error generated at the curved waveguides. A 200GHz spacing 16 channel devices were fabricated by ArF immersion and EB lithography and the results are compared.
Institute for Photonics-Electronics Convergence System Technology (PECST), Oki Electric Industry Co., Ltd., 1-16-8 Chuo, Warabi, Saitama 335-8510, Japan
Institute for Photonics-Electronics Convergence System Technology (PECST), Oki Electric Industry Co., Ltd., 1-16-8 Chuo, Warabi, Saitama 335-8510, Japan
Institute for Photonics-Electronics Convergence System Technology (PECST), Oki Electric Industry Co., Ltd., 1-16-8 Chuo, Warabi, Saitama 335-8510, Japan
Institute for Photonics-Electronics Convergence System Technology (PECST), National Institute of Advanced Industrial Science and Technology (AIST), West 7SCR, 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, JAPAN