Soft magnetic nanogranular thin films were fabricated on Si substrates using radio frequency (rf) magnetron sputtering in an argon ambient. The electrical, magnetic and high-frequency properties of these thin films were studied in details. chips were placed in the erosion race-track of the alloy (at.%) target and change the number of chips result in the different film composition. The optimal films with desired properties of low coercivity, , high saturation magnetization, and high electrical resistivity were obtained. Permeability spectra measured shows that its natural ferromagnetic resonant (FMR) frequency and initial permeability were about 4.05 GHz and 120, respectively. The tested results shown that the film thickness had an important effect on films properties, it can convenient adjust the and damping factor of films. With the increase of film thickness from 50 nm to 1200 nm, the of films ranged from 2.86 GHz to 4.05 GHz. The excellent soft magnetic properties were ascribed to exchange coupling among magnetic particles.