We developed a coaxial-type fixture for precisely measurement of the impedance characteristics of small surface-mounted quartz crystal units. This fixture is applicable to the one-port S-parameter reflection method proposed in IEC60444–5, and measures the frequency impedance characteristics of a device under test (DUT) from its reflection coefficients. This measurement fixture uses a 65 GHz coaxial connector and calibrators with a 1.85 mm inside diameter. Using a “zero-length” coaxial center pin method, this fixture can be applied to up to 2 GHz devices without the need for electrical length compensation.