Journal of Microelectromechanical Systems > 2012 > 21 > 5 > 1098 - 1106
Source
Abstract
Identifiers
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2012.2203100 |
Journal of Microelectromechanical Systems > 2012 > 21 > 5 > 1098 - 1106
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2012.2203100 |