2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) > 1241 - 1244
Source
Abstract
Identifiers
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4673-0324-8 |
book e-ISBN : | 978-1-4673-0325-5 |
DOI | 10.1109/MEMSYS.2012.6170414 |