We propose the development of a new instrument, a Transmission Electron Probe Nano Analyzer (TEPNA), that integrates several innovations to optimize compositional characterization with a target spatial resolution of ∼20 nm for samples in the range of tens to hundreds of nanometers in thickness on various substrates. The proposed instrument takes advantage of the lack of significant beam scattering in a thin film to essentially limit the probed volume to the incident beam diameter (Fig 1), while several novel detection schemes in tandem are proposed to enhance the signal from the reduced analytical volume (Fig 2). Wavelength dispersive spectrometry (WDS) provides significant signal to noise and sensitivity advantages relative to energy dispersive spectrometry (EDS), since the background signal is only the signal under the peak as opposed to the continuous background for EDS.1 Documented sensitivity enhancements over EDS of 100 are typically obtained, which is why microprobe techniques are used for high sensitivity analysis of bulk samples.2 This instrument combines the simplicity of design and specimen geometry of Electron Probe Micro Analysis (EPMA) with the analytical protocols used for the Analytical Electron Microscope (AEM). The new TEPNA instrument integrates several proven and emerging technologies to optimize the compositional characterization of electron transparent structures with thicknesses in the range of nanometers to hundreds of nanometers on substrates. A targeted spatial resolution of ∼20 nm and rapid data collection would provide a convenient intermediate between that currently achieved by two widely available analytical instruments: the EPMA and the AEM with EDS.