Journal of Microelectromechanical Systems > 2011 > 20 > 6 > 1310 - 1323
Source
Abstract
Identifiers
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2011.2167675 |
Journal of Microelectromechanical Systems > 2011 > 20 > 6 > 1310 - 1323
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2011.2167675 |