This paper describes latest RF ATE (Automated Test Equipments) technologies including DUT (Device under Test) connections, calibration method as well as RF test module. A major interest of RF test is cost of test (COT). Most important respect for low COT is how achieve a number of simultaneous measurements and short test time. We realized the both respects by drastically downsized RF test module with multiple resources and high throughput. The module is installed in our RF ATE systems, and contributes for reducing COT. To improve efficiency of simultaneous measurements, RF calibration and DUT board are also very important. Major contribution for downsizing of the RF test module is RF circuit technology in form of RF functional system in package (RF-SIPs).