2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) > 172 - 175
Source
Abstract
Identifiers
book ISSN : | 1084-6999 |
book e-ISSN : | 1084-6999 |
book ISBN : | 978-1-4244-5761-8 |
book e-ISBN : | 978-1-4244-5764-9 , 978-1-4244-5763-2 |
DOI | 10.1109/MEMSYS.2010.5442539 |