Robust comb design for inductive displacement sensor with large travel and high sensitivity

S. Schonhardt; J.G. Korvink; U. Wallrabe

doi:10.1109/SENSOR.2009.5285692

Robust comb design for inductive displacement sensor with large travel and high sensitivity

Schonhardt, S., Korvink, J.G., Wallrabe, U.

Source

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference > 1912 - 1915

Abstract

We report on the increase of the sensitivity of variable reluctance inductive displacement sensors by the use of a novel comb configuration. In previous publications we showed that a comb configuration can be used to extend the traveling rage of electromagnetic actuators. This principle is now used for sensor applications. Experiments show an increase of sensitivity of 250% for a configuration of 8 comb fingers compared to previously reported designs featuring only one finger. Alternatively, very small air-gap widths can be avoided, rendering the sensors more robust and reliable to handle without sacrificing performance.