For motion system, the friction and servo lag are the factors of causing tracking error. Traditionally the friction is regarded as external disturbance and compensated by closed-loop control system. It often leads to quadrant glitches. In this paper, zero phase error tracking control (ZPETC) with friction compensation is presented where the friction model-LuGre model is established to estimate friction condition. Simulation and experimental results show that the controller can refine the tacking error compared with the ZPETC without friction compensation.