The contribution of Cr3+ substitution to perpendicular magnetic anisotropy in CoCr ferrite film fabricated by varying the Cr3+ substitution amount was studied. As the Cr3+ content increased in the CoCrxFe2-xO4 (x = 0.5, 0.75, 1, 1.25) films, saturation magnetic field decreased and the squareness ratio increased, showing the increase of perpendicular magnetic anisotropy. Films with x greater than 1 had magnetic easy axis perpendicular to the film plane. This result is related to the fact that as Cr3+ substitution amount increased, saturation magnetization decreased from 240 emu/cm3 (x = 0.5) to 24 emu/cm3 (x = 1.25).