Journal of Microelectromechanical Systems > 2007 > 16 > 6 > 1419 - 1428
Source
Abstract
Identifiers
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2007.908435 |
Journal of Microelectromechanical Systems > 2007 > 16 > 6 > 1419 - 1428
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2007.908435 |