A piezoelectric micro mass flow controller (MMFC) for liquid fuel injection into a mini-HCCI-motor for power generation is introduced. Piezoelectric actuation ensures negligible power consumption for fuel injection allowing self-sustaining operation. A pressurized fuel tank is connected to the MMFC which is designed like a normally-closed, on-/off-operating valve. Integrated piezoresistors are used for feedback control and an implemented pn-diode (sensitivity: -2.5 mV / K) enables on-chip temperature monitoring. Flow rates of up to 70 mul/s at 100 kPa fuel pressure have been demonstrated. The power consumption of the piezoelectric actuator during steady state operation is max. 20 muW at 120 V.