Journal of Microelectromechanical Systems > 2007 > 16 > 4 > 912 - 918
Source
Abstract
Identifiers
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2007.901123 |
Journal of Microelectromechanical Systems > 2007 > 16 > 4 > 912 - 918
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2007.901123 |