2007 International Conference on Perspective Technologies and Methods in MEMS Design > 37
Source
Abstract
Identifiers
book ISBN : | 978-966-553-614-7 |
DOI | 10.1109/MEMSTECH.2007.4283420 |
book ISBN : | 978-966-553-614-7 |
DOI | 10.1109/MEMSTECH.2007.4283420 |