In this work, Fe65Co35 alloy which has maximum saturation magnetization (Ms) among all metal magnetic materials was chosen to make Fe65Co35-SiO2 granular films, and the magnetic properties in whole composition were studied. The results show that good high frequency soft magnetic films were obtained by carefully controlling the microstructure. A serious (Fe65Co35)x(SiO2)1-x granular films are fabricated by RF magnetron co-sputtering. X-ray diffraction shows that all samples have bcc structure of Fe65Co35 alloys. Transmission electronic microscope (TEM) image and the corresponding electronic diffraction (ED) pattern for a typical sample of x = 0.57 show that the sample consists of bcc Fe65Co35 particles embedded uniformly in insulating SiO2 matrix. Magnetic hysteresis loops measured by vibrating sample magnetometer (VSM) shows that the samples have in plane uniaxial anisotropy, and anisotropy field is around 60 Oe.