Morphology changes of both corona-aged original and nano-inorganic hybrid polyimide film were characterized by SEM. 4 kV power frequency voltage and 4 kV, 5 kHz square pulse voltage were applied to the specimen respectively. It was found that the honeycomb structure appeared on the aged surface of original film, and crack and some inorganic like substance exhibit on the aged surface of the nano-inorganic hybrid film. After square pulse corona aging, the surface of corona region was more scorching than that of after power frequency aging