This paper presents a high-precision measurement method based on 3-DOF parallel kinematic mechanism for the position and attitude measurement of the moving object in a plane. The principle is explained and the error model is built in detail, then the mapping relationship between the initial errors caused by the mechanical factors and the terminal position and attitude errors is deduced. The simulation results of the data and the graphics shows that this kind of method based on 3-DOF parallel kinematic mechanism for the plane movement position and attitude measurement is rational. Finally, the evaluation of the precision is given