A new silicon based planar miniaturized high-pass filter is presented in this paper by using hybrid coupling transmission line (HCTL) together with Via-CBCPW. Micromachined process is employed to fabricate the designed filter. The smallest size of 3.7 mm times 5 mm for a high-pass filter working in the same operating frequency range is achieved by considering the mutual coupling effects of HCTL. The measured results show that the stop band is 0-9 GHz with more than 14 dB suppression and one zero point at 8 GHz, and in the pass band, in the range of 11-25 GHz the insertion loss is better than 5 dB, while in the range of 20-23 GHz the insertion loss is better than 3 dB