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Silicon oxide (SiO x , x~1.3) films ~100 9 thick were prepared by evaporation from a silicon monoxide source. The stoichiometry and chemical state of the samples were characterised by X-ray photoemission spectroscopy showing that they can be described as a mixture of Si + and Si 3+ species. Further characterisation was done by X-ray absorption spectroscopy at the SiK...
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