Cemented carbide has been investigated as a useful material for the fabrication of micro devices. Focused ion beam (FIB) micro-milling has been found to be one of the most appropriate methods for the fabrication of micro devices. The experimental FIB micro-milling on cemented carbide have been conducted according to the L 16 orthogonal array of Taguchi technique. Beam current, extraction voltage, angle of beam incidence, dwell time and percentage overlap between beam diameters have been considered as process variables of FIB micro-milling in experimental design. Material removal rate (MRR) and surface roughness have been determined experimentally for FIB micro-milling of cemented carbide and beam current has been identified as the most significant parameter. The minimum surface roughness of 5.6nm has been reported on cemented carbide, which is not a usual practice to achieve on such polycrystalline material, and hence it may be considered as a significant research contribution. Maximum MRR of 0.4836μm 3 /s has been reported. Moreover, genetic algorithm toolbox of MATLAB has been utilized for multi-objective optimization between MRR and surface roughness. The corresponding optimum values of MRR and surface roughness for multi-objective optimization have been represented by pareto optimum solution generated by genetic algorithm. The research work presented in this paper determines the setting of process parameters of FIB micro-milling for achieving a specific combination of MRR and surface roughness on cemented carbide.