In the paper, the tribological characteristics of CeF 3 compact sliding against high speed steel and stainless steel were studied. The sliding oxidation behavior of CeF 3 compact was investigated and compared with that of in sliding against Hastelloy C, a Ni-based alloy. Findings indicated that the sliding oxidation behavior was different as a result of different materials of the pin. When the pin was made of steel, the sliding oxidation was severe. Finally, the chemical reactions of metal from the pin with F were corresponded with the sliding oxidation behavior.