Positron measurements were performed for detection of the subsurface zone in the stainless steel 1.4301 (EN) exposed to dry sliding. They revealed the defect profile induced by dry sliding which is extended inward the worn surface from 85μm to 400μm depending on the applied load during the tribo-test. This result was obtained using the positron techniques, while the microhardness profile exhibited shorter range of the microhardness depth profile, i.e., from 70μm to 150μm. However, at the depth of about 5μm from the worn surface the sudden increase in the microhardness was observed. The complementary measurements of X-ray diffraction and SEM micrographs of the worn surface were also performed.