The results of holographic gratings recording in 29, 15 and 8nm thick As 2 S 3 films are presented in the paper. The method is based on the interference of surface-propagating evanescent waves, created by total internal reflection. The condition for successful recording is the penetration depth of these inhomogeneous waves to be greater than the films thickness. In this case, the film’s refractive index does not affect the total internal reflection (TIR) condition and could be greater than the input glass prism. The experimentally obtained low diffraction efficiencies by this holographic recording technique is due to the very low refractive index modulation, but the good signal-to-noise ratio – better than 50:1 and Bragg-type diffraction are a base for future applications of this grating formation method in nanotechnology.