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An optical switch is fabricated by using micromachining technology, which is based on thin nanocrystalline vanadium oxide (VO x ) film, and it consists of four layers: a silicon (Si) substrate layer, a VO x layer, a Si 3 N 4 buffer layer, and an aurum (Au) electrode layer. By applying a switching power supply to a pair of the Au electrodes, the optical switch is controlled...
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