The oxidation behavior of a Ni-based superalloy with polycrystalline, single-crystalline (SC) and nanocrystalline (NC) structures was studied at 1000 °C in water vapor (20.12 vol.%) plus oxygen. The oxidation behavior of the SC alloy was similar to that of the cast alloy, while nanocrystallization increased the corrosion resistance. The oxides scale on the SC alloy and cast alloy consisted of external TiO 2 , Cr 2 O 3 and internal Al 2 O 3 , while only external Al 2 O 3 scale formed on the NC coating in water vapor plus oxygen. Meanwhile, the morphologies of oxides scale on three samples are significantly different from one another. The effect of micro-structures on the oxidation behavior of this Ni-based superalloy is discussed.