A mild and efficient method for the selective deprotection of primary allylic and homoallylic, primary benzylic and aryl tert-butyldimethylsilyl (TBDMS) ethers has been established using a combination of H 2 O and DMSO at 90°C. All other primary and secondary TBDMS ethers remained unaffected under the reaction condition. The method is very effective in deprotection of TBDMS ethers in the presence of other sensitive functional groups.