Diluted magnetic semiconductor Cd 1−x Fe x S (0<x<0.4) films were grown by the low-pressure metal organic chemical vapor deposition on c-Al 2 O 3 substrates. All the films were fabricated at 633 K under a hydrogen pressure of 10 4 Pa. Structure and composition analysis revealed that the Fe was alloyed into the lattice structure of CdS, forming solid solution instead of precipitation. The room temperature optical band gap of Cd 1−x Fe x S films can be tuned from 2.454 to 2.310 eV with increasing Fe concentration from x=0 to 0.37. A typical Van Vleck-type paramagnetism of Cd 0.88 Fe 0.12 S film was observed using superconduction quantum interference device magnetometer below 6 K.