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Pt-doped SnO 2 gas sensors were fabricated on Si 3 N 4 membranes using silicon micromachining process. Applying a sol-gel deposition technique, it is possible to obtain a highly porous tin-oxide layer suitable for high sensitivity sensors. The sensing material was spin-coated over contact electrodes with a thickness ranging from 100 to 500nm and they were annealed at different...
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