High-resolution Cu L X-ray spectra from Cu, Cu 2 O and CuO targets induced by MeV H, He, C and F ions have been measured. High-resolution Cu Lα 1 , 2 and Lβ 1 X-ray spectra from Cu, Cu 2 O and CuO targets induced by 2.0 MeV focused protons have been also measured. It is shown that high-resolution X-ray spectra are sensitive to the chemical states of the emitting projectile and target atoms. The Cu Lα 1 , 2 and Lβ 1 X-ray spectra were compared with Cu2p XPS spectra to investigate the atomic and electronic structures and electron excitation and relaxation processes in Cu and its compounds. High-resolution X-ray spectroscopy with a microbeam is found to be useful for analysis of the chemical environment of atoms of interest in the near surface region of bulk and particle samples.