Germanium dioxide nanowires (GeONW) have been synthesized by a physical evaporation method. The morphology, structure and chemical composition of the wires were characterized using transmission electron microscopy (TEM) and spectroscopy of energy dispersive X-ray fluorescence (EDX). TEM observations show that the GeONWs have a very high purity and diameter ranging from 15 to 80 nm. EDX analysis reveals that the GeONWs consist of Ge and O elements. Electron diffraction patterns taken on a single GeONW are spotty patterns of single crystals and are well indexed to a GeO 2 single crystal of hexagonal structure.