Si film was prepared by electrodepositing on Ni substrate. SEM images and EDS analysis illustrated that the Si film was obtained successfully. The Si film anodes displayed a high reversible specific capacity (over 2800 mAhg −1 ), an excellent stability (little fading after 80 cycles at a current of 0.36 Ag −1 , corresponding to 0.1C), high rate performances (850 mAhg −1 at a current of 18 Ag −1 , corresponding to 5C) and high electrochemical stability (The capacity was still more than 2600 mAhg −1 , when the current density returned to 0.36 Ag −1 after cycling at the high current densities). Electrochemical impedance spectroscopy tests showed that the Li + diffusion coefficient of the Si film was much higher than the pristine Si nanoparticles, which resulted in the high rate performances of the Si film.