Multi-parametric theoretical studies to analyze the effect of both the matter properties (absorption coefficient, thermal conductivity and diffusivity) and the heating field parameters (spatial distribution and pulse duration) on the resulted temperature distribution are presented. For heating in sub-micrometric range (<1μm), a low dependence of heating temperature distribution on the sample thermal properties and heating source duration was observed. Nano-ablation thresholds are found to be increasing inversely with heating source dimensions. The simulation results demonstrated a good agreement with the nanometer-size craters (100nm diameters, 10nm depth) obtained experimentally with a tip-enhanced near-field ablation (4ns laser pulse duration, 266nm wavelength) of Si- and Au-samples.