Ion beam analytical methods (e.g. Rutherford Backscattering, RBS, Elastic Recoil Detection, ERD, or Nuclear Reaction Analysis, NRA) are widely used for quantitative determination of the depth distribution of elements. In porous samples however, where the diameter of the pores is a few tens of nm (i.e. unresolvable even by the most sophisticated microbeam), the measured depth distribution differs from the real one and this difference strongly depends on the pore structure.