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In this paper, a variation of local point interpolation method (vLPIM) is presented for meshless analysis of microelectromechanical systems (MEMS) devices, in which the weight function is assigned by high-order spline functions, instead of the Galerkin formulation of the local point interpolation method (LPIM). The present vLPIM with Timoshenko beam theory are then used to analyze MEMS. In the conventional...
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