In current study the kinetics of thick single track formation during cold spraying of 316L stainless steel powder is considered. It is shown that at low nozzle traverse speed the tracks have triangular-like profiles and powder deposition efficiency significantly depends on the triangle height. In particular, increasing of track height leads to significant decreasing of deposition efficiency (more than 35%) due to diminishing of effective impact angle between particles and surface. Numerical simulation results show that parameters of near-substrate compressed gas layer change during coating growth. Compressed gas layer becomes thicker at the jet periphery that decreases particle impact velocity that also influences the particle deposition efficiency in this zone.