One of the many applications of diamond like carbon (DLC) is the biocompatible coating of medical tools and implants. The most recent field of interest concerns the generation of antimicrobial activity in combination with the excellent wear resistance and biocompatibility of DLC. As has already been shown for polymers, nanoparticles of silver or copper within a carbonacious matrix have a bactericidal effect.In this work we describe a new technique to produce amorphous hydrogenated carbon films (a-C:H), which contain nanometer sized clusters of silver or copper. The hybrid deposition process is based on sol–gel synthesis of polymer films and subsequent ion-induced densification and cross-linking to form a-C:H. By thermal or UV-induced reduction of metal salts in polymer solution, colloidal metal particles are produced. In this way polymer films, already containing noble metal nanoclusters, can be deposited in a wet chemical step. Upon sol–gel deposition, the polymer is subjected to ion irradiation. Based on earlier results, the influence of ion energy on chemical and mechanical properties, as well as bonding structure is investigated. Special attention is also dedicated to ion-induced diffusion and growth as well as oxidation effects.